AN AUTOMATED PHOTOMETRIC ELLIPSOMETER

Authors
BILENKO DI DVORKIN BA POLYANSKAYA VP MELNIKOVA TE
Citation
Di. Bilenko et al., AN AUTOMATED PHOTOMETRIC ELLIPSOMETER, Russian journal of nondestructive testing, 31(5), 1995, pp. 350-353
Citations number
3
Categorie Soggetti
Materials Science, Characterization & Testing
Journal title
Russian journal of nondestructive testing → ACNP
ISSN journal
10618309
Volume
31
Issue
5
Year of publication
1995
Pages
350 - 353
Database
ISI
SICI code
1061-8309(1995)31:5<350:AAPE>2.0.ZU;2-C
Abstract
The paper discusses the scope for using photometric ellipsometers in e ngineering processes, namely in measuring instruments for industrial p urposes. The scheme is presented for a novel ellipsometer in which the measurement accuracy is improved by factors of more than ten by compa rison with traditional instruments. This ellipsometer enables one to m onitor the properties of layered structures with a thickness resolutio n of 2-5 Angstrom for dielectric layers.