THE EFFECT OF LASER IRRADIATION ON TITANI UM FILMS IN BENZENE

Authors
CHAPLANOV AM SHIBKO AN
Citation
Am. Chaplanov et An. Shibko, THE EFFECT OF LASER IRRADIATION ON TITANI UM FILMS IN BENZENE, Doklady Akademii nauk BSSR, 37(3), 1993, pp. 42-44
Citations number
6
Categorie Soggetti
Multidisciplinary Sciences
Journal title
Doklady Akademii nauk BSSR → ACNP
ISSN journal
0002354X
Volume
37
Issue
3
Year of publication
1993
Pages
42 - 44
Database
ISI
SICI code
0002-354X(1993)37:3<42:TEOLIO>2.0.ZU;2-A
Abstract
The effect of laser irradiation on titanium films immersed in benzene has been investigated. It is shown that laser annealing of Ti films re sults in recrystallisation and oxidation processes due to heating and the presence of residual oxygen. Ti3O5 with the orientation (001) is f ormed. Benzene is used as a protective medium for Ti films in the proc ess of laser irradiation.