Plasma polymerization reactions and plasma polymers of xylene/air, xyl
ene/argon, xylene/air/argon, toluene/air/argon, dioxane and allyl cyan
ide were compared with respect to discharge power (between 50 and 500
W), where all other plasma operational parameters were kept constant.
In plasma polymerization, the glow characteristics are known to play a
n important role depending on the factor W/F,where W is the discharge
power and Fis the monomer flow rate. In plasma polymerization reaction
s, it is known that decomposition of the monomer and/or polymer produc
ed competes with polymer formation. Above a certain power level, polym
er decomposition may become the predominant reaction, and hence polyme
r deposition rates decrease with increasing discharge power. The plasm
a polymer films were characterized by Fourier transform infra-red spec
troscopy, elemental analysis and thermogravimetric analysis. Infra-red
spectra of the plasma polymers obtained indicated that when the disch
arge power was increased, the absorption intensities of all the functi
onal groups decreased. The deposition rates and chemical structures of
the plasma polymers prepared appeared to depend strongly on the struc
ture and characteristics of the monomer used and on the conditions of
discharge and other operational parameters.