Cu-Ga-Se films of different composition prepared by MBE technique were
examined by reflection high energy electron diffraction, electron pro
be for micro analysis, X-ray diffraction and photoluminescence. The va
lence stoichiometry of the films is fulfilled at unity molecularity, s
howing that CuGaSe2 is possible to be grown by MBE. The valence stoich
iometry is almost conserved in a wide range of molecularity of the fil
ms. It is proven that the films have chalcopyrite structure over a rem
arkably wide range of Cu-rich composition and that the CuGaSe2 films a
re epitaxially grown with the c-axis perpendicular to the (001) plane
of GaAs substrate. The low temperature photoluminescence on epitaxiall
y grown films of nearly stoichiometric and Cu-rich composition show sh
arp emission peaks at 1.71 eV attributed to exciton recombination, ind
icating that the him quality is rather high.