DESIGN FOR MANUFACTURE OF MICROMACHINED FABRY-PEROT CAVITY-BASED SENSORS

Currently, the operation of a number of sensors is based on the measur ement of the optical path length of a micro-Fabry-Perot cavity. In thi s paper we consider the impact of manufacturing variations on the perf ormance of such sensors, and discuss designs that minimize the impact of these variations. In particular, we consider how random variations in thickness of the cavity mirrors influence the accuracy with which t he gap can be measured. We find that an optimum combination of initial gap and mechanical travel of the cavity that gives the least variatio n in response curve exists for a given mirror design. This approach de termines the device design that maximizes the manufacturing yield of F abry-Perot sensors with a specified level of performance.