ACTIVE VIBRATION CONTROL AND ACTUATION OF A SMALL CANTILEVER FOR APPLICATIONS IN SCANNING PROBE INSTRUMENTS

Authors
CUNNINGHAM MJ JENKINS DFL CLEGG WW BAKUSH MM
Citation
Mj. Cunningham et al., ACTIVE VIBRATION CONTROL AND ACTUATION OF A SMALL CANTILEVER FOR APPLICATIONS IN SCANNING PROBE INSTRUMENTS, Sensors and actuators. A, Physical, 50(1-2), 1995, pp. 147-150
Citations number
16
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
50
Issue
1-2
Year of publication
1995
Pages
147 - 150
Database
ISI
SICI code
0924-4247(1995)50:1-2<147:AVCAAO>2.0.ZU;2-A
Abstract
The deflection control of a small cantilever is described, which opera tes using a single active piezoelectric element and optical vibration sensing, so that unwanted vibrations in the cantilever are removed, an d yet it remains possible to deflect the cantilever statically or dyna mically as required. Such a control system is directly applicable to t he very small cantilevers found in scanning probe microscopes, such as atomic force and magnetic force microscopes, the resolution of which is limited by unwanted vibration.