We propose a method to determine the band offset of a heterojunction b
ased on the elimination of the diffusion potential. In0.5Ga0.5/GaAs he
terojunction samples were used for demonstration of this method. As ma
ny error sources related to the determination of diffusion potential a
re avoided in our case, the more accurate value of 137 +/- 5 meV has b
een obtained for the conduction-band discontinuity. (C) 1996 American
Institute of Physics.