MEASUREMENT OF X-RAY TELESCOPE MIRRORS USING A VERTICAL SCANNING LONGTRACE PROFILER

A prototype of a vertical scanning long trace profiler was used to mea sure the surface of a polished x-ray telescope mandrel in a vertical c onfiguration and provides a 3-D view of the surface figure and slope e rrors. The design of the prototype system is described and experimenta l results are presented. Results indicate that the prototype instrumen t is capable of an absolute height measurement accuracy of about 50 nm with a repeatability of better than 20 nm, and a slope measurement ac curacy of about 1 microradian. (C) 1996 Society of Photo-Optical instr umentation Engineers.