Using electron paramagnetic resonance, the motion of oxygen vacancies
within the oxygen octahedron in perovskite BaTiO3 is observed via the
alignment of oxygen vacancy-related defect dipoles induced by bias/hea
t combinations, The vacancy motion is found to have an activation ener
gy of 0.91 eV, in excellent agreement with that predicted, It is found
that the onset of resistance degradation is also concurrent with oxyg
en vacancy motion, This result spectroscopically demonstrates that oxy
gen vacancy migration in the lattice is likely responsible for the obs
erved degradation.