PARTICLE FORMATION OF MATERIALS OUTGASSED FROM SILICONE SEALANTS BY CORONA-DISCHARGE IONIZERS

Particle formation of LMCS (low-molecular-weight poly-cyclo-dimethyl-s iloxane) outgassed from silicone sealants by a corona-discharge ionize r was studied by measuring the number concentration and size distribut ion of formed particles as well as by qualitative analyses of formed p articles with FT-IR (Fourier transformation infrared spectroscopy). Fu rther, the influence of humidity and oxygen on the particle formation was investigated to find the reaction mechanisms. As a result, it was found that the LMCS is polymerized to form particles with two differen t reaction paths and that the LMCS is one of the major species that co ntribute to the formation of silicon-containing particles in cleanroom environments.