N. Namiki et al., PARTICLE FORMATION OF MATERIALS OUTGASSED FROM SILICONE SEALANTS BY CORONA-DISCHARGE IONIZERS, Journal of the IES, 39(1), 1996, pp. 26-32
Particle formation of LMCS (low-molecular-weight poly-cyclo-dimethyl-s
iloxane) outgassed from silicone sealants by a corona-discharge ionize
r was studied by measuring the number concentration and size distribut
ion of formed particles as well as by qualitative analyses of formed p
articles with FT-IR (Fourier transformation infrared spectroscopy). Fu
rther, the influence of humidity and oxygen on the particle formation
was investigated to find the reaction mechanisms. As a result, it was
found that the LMCS is polymerized to form particles with two differen
t reaction paths and that the LMCS is one of the major species that co
ntribute to the formation of silicon-containing particles in cleanroom
environments.