REMOVAL OF PARTICULATE CONTAMINANTS USING ULTRASONICS AND MEGASONICS - A REVIEW

Authors
GALE GW BUSNAINA AA
Citation
Gw. Gale et Aa. Busnaina, REMOVAL OF PARTICULATE CONTAMINANTS USING ULTRASONICS AND MEGASONICS - A REVIEW, Particulate science and technology, 13(3-4), 1995, pp. 197-211
Citations number
64
Categorie Soggetti
Engineering, Chemical
Journal title
Particulate science and technology → ACNP
ISSN journal
02726351
Volume
13
Issue
3-4
Year of publication
1995
Pages
197 - 211
Database
ISI
SICI code
0272-6351(1995)13:3-4<197:ROPCUU>2.0.ZU;2-2
Abstract
Sonic cleaning is a commonly used technique for removal of particles f rom surfaces. The theory of particle removal using ultrasound is revie wed. Effects of cavitation and acoustic streaming are discussed. Exper imental results using ultrasonics and megasonics (ultrasonic cleaning near 1 MHz) from the literature are reviewed. Emphasis is placed on re moval of fine particles from silicon surfaces for semiconductor manufa cturing applications.