THE INFLUENCE OF ELECTRON REFLECTION AT THE ELECTRODE AND SECONDARY-ELECTRON EMISSION ON A STRONGLY MAGNETIZED LOW-PRESSURE RF DISCHARGE

With the help of a particle-in-cell/Monte Carte simulation, we study a strongly asymmetric cylindrical low-pressure RF discharge in an axial magnetic field. In particular, the effects of electron reflection fro m the electrodes and of ion-induced secondary electron emission are st udied. The process alone does not change the plasma characteristics; t his fact can be traced back to the gyro-motion of electrons in the ele ctrode sheath, which brings non-colliding electrons back to the electr ode. If electron reflection is allowed for, the overall plasma density is substantially increased. This effect is found qualitatively in exp eriments. We furthermore demonstrate the existence of high-energy elec trons throughout the bulk plasma; this fact is reminiscent of the well -known gamma-regime of unmagnetized RF discharges.