MODIFICATION OF THE SURFACE OF MATERIALS UNDER IRRADIATION WITH THE POLYENERGETIC BEAM OF HE+ AND AR+ IONS

We have studied the change of the surface strength properties of Be, A l, Ni, Cu, Mo, and 12Kh18N10T and 0Kh16N15M3B steels irradiated with t he polyenergetic beam of He+ and Ar+ ions. The effect of topography of irradiated surface and of the depth distribution of implanted atoms o n microhardness was explored. Irradiation with a polyenergetic beam le ads to an increase in microhardness due to migration of implanted atom s to depths several times as large as the projective range of He+ and Ar+ ions. The most exhaustive explanation of the deep penetration of i mplanted atoms can be obtained using the models allowing for the role of internal stresses and the size parameters of an ion and a target ma terial.