A new method to measure the tip's true vibrational amplitude in the sh
ear force microscopy is demonstrated. The measurements are based on mo
difications of the beam diffraction method. In addition to the dither
vibration, the equilibrium position of the tip is set to move along th
e direction of the vibration. The ratio of ac amplitude to the derivat
ive of de amplitude gives the tip's vibration. The sensitivity of this
method is determined by the size of the laser focal spot times the ra
tio of the ac to de signals of the diffracted light. (C) 1995 American
Institute of Physics.