PARALLEL ATOMIC-FORCE MICROSCOPY USING CANTILEVERS WITH INTEGRATED PIEZORESISTIVE SENSORS AND INTEGRATED PIEZOELECTRIC ACTUATORS

Citation
Sc. Minne et al., PARALLEL ATOMIC-FORCE MICROSCOPY USING CANTILEVERS WITH INTEGRATED PIEZORESISTIVE SENSORS AND INTEGRATED PIEZOELECTRIC ACTUATORS, Applied physics letters, 67(26), 1995, pp. 3918-3920
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00036951
Volume
67
Issue
26
Year of publication
1995
Pages
3918 - 3920
Database
ISI
SICI code
0003-6951(1995)67:26<3918:PAMUCW>2.0.ZU;2-H
Abstract
We have fabricated and operated two cantilevers in parallel in a new m ode for imaging with the atomic force microscope (AFM). The cantilever s contain both an integrated piezoresistive silicon sensor and an inte grated piezoelectric zinc oxide (ZnO) actuator. The integration of sen sor and actuator on a single cantilever allows us to simultaneously re cord two independent AFM images in the constant force mode. The ZnO ac tuator provides over 4 mu m of deflection at low frequencies (de) and over 30 mu m deflection at the first resonant frequency. The piezoresi stive element is used to detect the strain and provide the feedback si gnal for the ZnO actuator. (C) 1995 American Institute of Physics.