Sc. Minne et al., PARALLEL ATOMIC-FORCE MICROSCOPY USING CANTILEVERS WITH INTEGRATED PIEZORESISTIVE SENSORS AND INTEGRATED PIEZOELECTRIC ACTUATORS, Applied physics letters, 67(26), 1995, pp. 3918-3920
We have fabricated and operated two cantilevers in parallel in a new m
ode for imaging with the atomic force microscope (AFM). The cantilever
s contain both an integrated piezoresistive silicon sensor and an inte
grated piezoelectric zinc oxide (ZnO) actuator. The integration of sen
sor and actuator on a single cantilever allows us to simultaneously re
cord two independent AFM images in the constant force mode. The ZnO ac
tuator provides over 4 mu m of deflection at low frequencies (de) and
over 30 mu m deflection at the first resonant frequency. The piezoresi
stive element is used to detect the strain and provide the feedback si
gnal for the ZnO actuator. (C) 1995 American Institute of Physics.