Polarization-independent waveguiding at 1.32 and 1.54 mu m was observe
d in single-crystal S1-x-yGexCy grown nearly lattice matched upon Si(1
00) by chemical vapor deposition. Losses were <5 dB/cm at 1.54 mu m. E
xperiments indicate that the band gap of three SiGeC alloy waveguides
was in the 0.93-0.99-eV range, in agreement with theory. (C) 1996 Opti
cal Society of America