OPTICAL PROPERTY OF PB(ZR,TI)O-3 THIN-FILMS DEPOSITED ON TRANSPARENT SUBSTRATES BY ATMOSPHERIC-PRESSURE METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION

Authors
LEE JM CHO HS SHIN JC KIM HJ KIM DY KWUN SI
Citation
Jm. Lee et al., OPTICAL PROPERTY OF PB(ZR,TI)O-3 THIN-FILMS DEPOSITED ON TRANSPARENT SUBSTRATES BY ATMOSPHERIC-PRESSURE METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION, JPN J A P 1, 34(11), 1995, pp. 6112-6115
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
34
Issue
11
Year of publication
1995
Pages
6112 - 6115
Database
ISI
SICI code
Abstract
Ferroelectric Pb(Zr, Ti)O-3 (PZT) thin films were successfully deposit ed on PbTiO3/ITO/Corning glass and PbTiO3/(100)MgO single-crystal subs trates by atmospheric-pressure metal-organic chemical vapor deposition . The PZT thin films deposited at 400 degrees C showed poor optical tr ansparency, while PZT thin films showing high transmittance were depos ited above 450 degrees C. The PZT thin films deposited at 500 degrees C showed an optical transparency of 80% and a good quadratic electro-o ptic effect, of which the coefficient was 1.0 x 10(-18) m(2)/V-2.