DEPTH AND STATE ANALYSES OF DEUTERIUM AND HELIUM IN D-2-ANNEALED HE-IMPLANTED YTTRIUM-IRON-GARNET()

Simultaneous depth analysis of deuterium and helium in the surface lay er of deuterium-annealed He+-implanted yttrium iron garnet (YIG) was a chieved by means of elastic recoil depth analysis (ERDA) and the resul ts were compared with those;of state analysis of deuterium and helium extracted by thermal desorption mass spectrometry (TDS). As a result, it was shown that both deuterium and helium moved to the strained latt ice sites due to implantation via thermal annealing of the samples. By annealing the critically helium-saturated sample, helium atoms remain ed at the stable sites in the lattice, while deuterium occupied the le ss stable sites. Stabilization of helium sites at annealing temperatur e of around 350 degrees C was observed for unsaturated and critically saturated samples. In the case of an oversaturated sample, three kinds of sites for helium were found, and it was observed that helium forme d bubbles and that deuterium concentrated at sites corresponding to th ose of helium via annealing.