A new technique allowing elemental analysis of small regions of scanni
ng tunneling microscopy (STM) substrates without loss of tip-surface r
egistry has been developed. The technique is based on spark atomic emi
ssion spectroscopy and provides information normally unavailable from
the STM. In this technique, a voltage excursion (> 100 V) is used to e
xcite the sample and cause emission. Spectra from a polished copper el
ectrode surface are presented and discussed. Important parameters and
present limitations are also discussed along with future directions fo
r the improvement and long-term use of the technique.