A NEW DYNAMIC TECHNIQUE FOR THE CALIBRATION OF VACUUM GAUGES (DOUBLING PRINCIPLE)

A new dynamic technique for the calibration of vacuum gauges is descri bed. It does away with the limitations of the gas flow regime and, due to that, the calibration range is extended in the direction of high p ressures. The technique is based on the addition of the known gas flow rate with the other gas flow rate, equal to the known one, that is es tablished by the identity of corresponding vacuum gauge readings, and on the following cyclic adjustment of the gas flow rate through a leak and a constant inlet element. As a result, a sequence of pressure val ues is reproduced in a calibration chamber, each subsequent pressure b eing two times higher than the proceeding one (doubling principle). Th e examples of the application of this technique using a reduction (dyn amic expansion) calibration arrangement, are given.