A polysilazane precursor was studied from 500 to 1600-degrees-C by mea
ns of thermogravimetry and associated mass spectrometry. At 550-degree
s-C, opposite influences of methane and hydrogen partial pressures on
the weight loss were evidenced. At 1600-degrees-C, the amorphous solid
crystallizes into silicon, silicon carbide and silicon nitride phases
by producing carbon and silicon monoxides and nitrogen.