ACCURACY IN CALIBRATING ELECTRON-MICROSCOPES WITH SILICON SLOT STRUCTURES

Authors
NOVIKOV YA STEKOLIN IY
Citation
Ya. Novikov et Iy. Stekolin, ACCURACY IN CALIBRATING ELECTRON-MICROSCOPES WITH SILICON SLOT STRUCTURES, Measurement techniques, 38(5), 1995, pp. 590-593
Citations number
12
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement techniques → ACNP
ISSN journal
05431972
Volume
38
Issue
5
Year of publication
1995
Pages
590 - 593
Database
ISI
SICI code
0543-1972(1995)38:5<590:AICEWS>2.0.ZU;2-W
Abstract
Accuracy is examined in calibrating a scanning electron microscope by means of linear measures in the form of slot-type submicrometer struct ures in silicon from the distances between the peaks in the video sign als and the sizes of the bottom of the video signals and the slot with one known dimension. Focussing affects the error in calibrating the S EM. The limiting errors in the calibration have been estimated, which are governed only by the errors in certifying the slot structures.