STUDIES OF AMORPHOUS HYDROGEN-FREE DIAMOND-LIKE FILMS PRODUCED BY IONAND PLASMA BEAM TECHNIQUES

The properties of hydrogen-free diamond-like films produced by the ion beam techniques depend on the carbon ion energy. In this theses a mas s-separator was used to investigate the dependence of carbon ion energ y on sp(3)/sp(2) -bonding ratio. The ESCA (Electron Spectroscopy for C hemical Analysis) and Raman techniques were used to characterize the b onding structure of the films. The films with optimum quality (similar to 80 % sp(3)-bondings) were produced within the carbon ion energy ra nge of 40 - 140 eV.