M. Hakovirta, STUDIES OF AMORPHOUS HYDROGEN-FREE DIAMOND-LIKE FILMS PRODUCED BY IONAND PLASMA BEAM TECHNIQUES, Acta polytechnica Scandinavica. Ph, Applied physics series, (203), 1996, pp. 1-31
The properties of hydrogen-free diamond-like films produced by the ion
beam techniques depend on the carbon ion energy. In this theses a mas
s-separator was used to investigate the dependence of carbon ion energ
y on sp(3)/sp(2) -bonding ratio. The ESCA (Electron Spectroscopy for C
hemical Analysis) and Raman techniques were used to characterize the b
onding structure of the films. The films with optimum quality (similar
to 80 % sp(3)-bondings) were produced within the carbon ion energy ra
nge of 40 - 140 eV.