AN ACETIC-ACID WATER-BASED SOL-GEL PZT PROCESS .1. MODIFICATION OF ZRAND TI ALKOXIDES WITH ACETIC-ACID

The chemical reactions underlying the formation of a water based alkox ide sol gel solution for lead zirconate titanate thin films have been evaluated using infra-red spectroscopy and viscosity measurements. Tit anium isopropoxide and zirconium propoxide are modified by acetic acid in order to use water as a solvent. Substitution reactions initially take place with the formation of titanium or zirconium alkoxide acetat e and alcohol. The titanium or zirconium alkoxide acetate gradually as sociate through the formation of M-O-M linkages to increase the viscos ity of the solution.