Now that it is possible to observe individual atoms and molecules adso
rbed on a surface, a method is required to evaluate the correlation be
tween the occupancy of neighbouring sites. To meet this need, a rigoro
us theoretical analysis of the distribution of adsorbates on surface s
ites has been developed, first for uncorrelated adsorption, and then f
or cases where the occupation of a site affects the probability of occ
upation of a neighbouring site. Statistical parameters can be measured
from experimental images and related directly to the theoretical mode
l, with allowance being made for defects and edge effects. By analysin
g scanning tunnelling microscope images in this way, it is found that
trimethylgallium on GaAs(001)-(2x4) exhibits enhanced nearest neighbou
r occupation, whereas ethylene on Si(001)-(2x1) shows nearest neighbou
r repulsion.