MATERIALS TECHNOLOGY FOR GASB-BASED OPTOELECTRONIC DEVICES

Authors
PIOTROWSKA A KAMINSKA E PIOTROWSKI TT PISKORSKI M GUZIEWICZ M PAPIS E GOLASZEWSKAMALEC K KASJUNIUK S
Citation
A. Piotrowska et al., MATERIALS TECHNOLOGY FOR GASB-BASED OPTOELECTRONIC DEVICES, Acta Physica Polonica. A, 90(5), 1996, pp. 903-906
Citations number
1
Categorie Soggetti
Physics
Journal title
Acta Physica Polonica. A → ACNP
ISSN journal
05874246
Volume
90
Issue
5
Year of publication
1996
Pages
903 - 906
Database
ISI
SICI code
0587-4246(1996)90:5<903:MTFGOD>2.0.ZU;2-P
Abstract
A study is made of surface preparation, metallization, patterning and dielectric deposition with the aim of developing process technology fo r GaSb-based photonic devices.