SCANNING ELECTRON-MICROSCOPE DESIGN FOR QUANTITATIVE MULTICONTRAST

Conceptual designs of scanning electron microscopes (SEMs) using a tim e-of-flight electron spectrometer are presented. The procedure for mak ing quantitative measurements with such SEMs is shown to be much simpl er and versatile than using conventional SEMs. SEMs which use an elect ron time-of-flight spectrometer are able to operate as multicontrast a nalytical probes, capable of simultaneously quantifying surface topogr aphy, voltage, and material type. In addition, it is demonstrated that these SEMs can be designed to have high spatial resolution, good sign al-to-noise characteristics, and to be of compact table-top size.