We have found that the coercivity was increased when a Co/Pt multilaye
r on a Si3N4 underlayer was prepared onto a rotating substrate. A more
than twofold increase in the coercivity is thought to be due to the e
nhancement of domain wall pinning effects caused by an increase of sur
face roughness in the Si3N4 underlayer. According to the results of at
omic force microscopy, the surface of the Si3N4 underlayer prepared on
to a rotating substrate was rougher than that of an underlayer prepare
d onto a stationary substrate. We believe that the enhancement of surf
ace roughness is due to the oblique incidence of sputtered materials o
n the rotating substrate.