SILICON TUBES FOR MICROELECTRONIC APPLICATIONS GROWN DIRECTLY FROM THE MELT

A die-free technique for growing large diameter silicon tubes (5-15 cm ) directly from the melt has been developed. Tile attained result was a constant tube wall thickness for a range of 7 to 0.2 mm at 1500 mm l ength limited by the equipment pulling stroke. It is shown that the in ner pressure of tile tube is function of tile meniscus height at tile growth interface. A speed is also presented. By means of experiments t hf thermal gradient at tile solid-liquid interfaces is determined.