The behavior of adatoms, step-edge atoms, and in-layer atoms at high t
emperature plays an important role in determining the growth mode of e
pitaxial thin films and crystals, the crystal shape change, and the mo
rphology of crystal surfaces. From a direct field ion microscope obser
vation, we find that around 500 K an edge atom of the Ir(111) step can
ascend the step to the upper terrace as well as dissociate to the low
er terrace. The activation barrier height for the ascending motion is
measured to be 1.51 +/- 0.10 eV, whereas the dissociation barrier is s
imilar to 1.6 +/- 0.2 eV. Surprisingly, we also find that in-layer ato
ms can jump up to terrace sites, thus forming adatom-vacancy complexes
, at unexpectedly low temperatures.