AN ELECTROCHEMICAL MICROACTUATOR - PRINCIPLE AND FIRST RESULTS

A novel electrochemical microactuator made with the use of silicon mic romachining techniques, and its feasibility, are presented, Gas pressu re is generated by electrolysis of an aqueous electrolyte solution, Th e pressure built up is used to change the deflection of a membrane, Th e actuator has three states: the electrolysis state, in which the pres sure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reverse the electrolys is reaction, The advantage of this type of actuation is a relatively l arge pressure generation with low energy consumption, Power is require d only for pressure build-up and for changing the states, Therefore, t his type of actuation has promising applications in pumps or active va lves. [162]