SURFACE-MICROMACHINED COMPONENTS FOR ARTICULATED MICROROBOTS

A class of articulated micromanipulator robots with multiple degrees o f freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a milligram are proposed, Rigid links, mechanical cou plings, and large-force, large-displacement micromotors have been crea ted, Hollow triangular beams made from rotated microhinged polysilicon plates with polysilicon locks can withstand axial loads of up to 2.6 gm, Mechanical couplings with sliding mechanisms are used to rotate hi nged structures off the substrate, The typical frictional force observ ed is approximately 2 mu N, Linear electrostatic stepper motors with a n estimated force of 6.5 mu N at 35 V and a travel of 40 mu m have als o been demonstrated. [160]