MASTER RECORDING USING KR ION LASER

Resolution of a master recorder using Kr ion laser was investigated by means of computer simulation and experimentation. Limitary pit length PL(min) was indicated by the k factor: PL(min) = k x (wavelength)/(nu merical aperture). When the duty of the write pulse DT was 0.5, k was 0.56 in simulation. For DT = 0.36, k was 0.57. In the experiment pit w idths were measured from scanning electron micrographs. Experimental r esults showed the same tendency as the simulated results. K factors in the experiment were 15.8 percent (DT = 0.5) or 20.7 percent (DT = 0.3 6) worse than those in the simulation. The optical system of the recor der is tested using the Twyman-Green interferometer and the knife-edge method. An interferogram shows a good performance. Measured half-widt h of the spot was 0.24-mu-m. It was close to the ideal diameter of 0.2 3-mu-m.