CRYSTALLOGRAPHIC TEXTURE IN CUBIC BORON-NITRIDE THIN-FILMS

Citation
Dl. Medlin et al., CRYSTALLOGRAPHIC TEXTURE IN CUBIC BORON-NITRIDE THIN-FILMS, Journal of applied physics, 79(7), 1996, pp. 3567-3571
Citations number
26
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00218979
Volume
79
Issue
7
Year of publication
1996
Pages
3567 - 3571
Database
ISI
SICI code
0021-8979(1996)79:7<3567:CTICBT>2.0.ZU;2-4
Abstract
We examine the crystallographic texture exhibited by cubic boron;nitri de (cBN) in thin films grown by ion-assisted deposition. Our analysis indicates that the cBN is preferentially oriented such that individual crystallites have at least one [111] direction lying in the plane of the film but are otherwise randomly oriented about (1) the substrate n ormal and (2) the in-plane cBN [111] axis. This preferential orientati on is consistent with an alignment between the cBN {111} planes and th e basal planes of the layer of highly oriented graphitic boron nitride :that forms in the initial stages of film growth.