SUBMICRON SILICON STRUCTURES FOR THIN-FILM SOLAR-CELLS

The realization of a lateral structured thin solar cell based on silic on is introduced and advantages such as increased internal electric fi elds, light diffraction into the bulk of tile absorber, and improved l ight trapping are discussed. The key process for tile realization of s uch a solar cell is the interference laser recrystallization of amorph ous silicon which has been applied to produce stripe, grid, and dot ar rays. The experimental set-up of the laser recrystallization is presen ted, and a detailed description of electronic properties of laser recr ystallized, boron doped silicon films is given.