2-DIMENSIONAL RAMAN IMAGING ANALYSIS OF MICROCRYSTAL DIAMOND FILM

Two-dimensional distributions of the impurity carbon (sp(2)-bonded car bon), crystallinity, and tensile stresses in a (111) oriented diamond crystal of a diamond thin film were studied by using Raman imaging mic roscopy. The amount of the impurity carbon was more in the center of ( 111) plane than in the circumference of the plane. The crystallinity a nd tensile stress were also higher in the center than in the circumfer ence. Based on those two-dimensional distributions, we discuss the bou ndary structure between diamond carbon and sp(2)-bonded carbon in CVD diamond.