A pulsed glow discharge, operating in the microsecond regime, has been
found to be advantageous for the examination of solid samples. We hav
e studied the spectroscopic response by atomic emission, absorption, f
luorescence, and mass spectrometries. Results to date show enhanced ef
ficiency for analytical response of the sputtered sample atoms, This t
ype of discharge also permits acquisition of useful diagnostic informa
tion concerning glow discharge processes.