ELECTRON TRANSMISSION COEFFICIENT FOR TILTED SPECIMENS

Starting from a scattering model, the transmission coefficient of elec trons for an oblique angle of incidence is derived. The descent of the transmitted fraction is described by the backscattering of electrons and the energy loss caused by the decreasing mean free path. The angul ar and energy distribution of electrons is replaced by the most probab le angle and mean energy. A comparison with other models and measureme nts valid for normal incidence was made. The altered transmission char acteristics by tilting the sample were verified by comparison with res ults from Monte Carlo simulations and results from Neubert and Rogasch ewski, which were based on measurements. An analytical expression for the transmission law was obtained.