SCANNING ELECTRON-MICROSCOPIC TECHNIQUE FOR IMAGING A DIAMOND TOOL EDGE

Authors
Citation
J. Drescher, SCANNING ELECTRON-MICROSCOPIC TECHNIQUE FOR IMAGING A DIAMOND TOOL EDGE, Precision engineering, 15(2), 1993, pp. 112-114
Citations number
NO
Categorie Soggetti
Engineering
Journal title
ISSN journal
01416359
Volume
15
Issue
2
Year of publication
1993
Pages
112 - 114
Database
ISI
SICI code
0141-6359(1993)15:2<112:SETFIA>2.0.ZU;2-F
Abstract
A technique is described to measure the edge radius of diamond cutting tools using the scanning electron microscope (SEM). This method attem pts to overcome two major limitations of the SEM in this application: low image contrast and lack of quantitative topographic information. A line of electron beam contamination, viewed at an angle, provides imp roved contrast for focusing and a means of obtaining the tool profile from the geometry.