SURFACE RECONSTRUCTION USING AN ALGORITHM-BASED ON CONFOCAL IMAGING

Authors
QUARTEL JC SHEPPARD CJR
Citation
Jc. Quartel et Cjr. Sheppard, SURFACE RECONSTRUCTION USING AN ALGORITHM-BASED ON CONFOCAL IMAGING, J. mod. opt., 43(3), 1996, pp. 469-486
Citations number
29
Categorie Soggetti
Optics
Journal title
J. mod. opt. → ACNP
ISSN journal
09500340
Volume
43
Issue
3
Year of publication
1996
Pages
469 - 486
Database
ISI
SICI code
0950-0340(1996)43:3<469:SRUAAO>2.0.ZU;2-X
Abstract
Reconstruction of surface profiles from scattering data is considered. An algorithm suggested by the confocal surface profiling method is ex plored using digital simulation. The effects of the surface roughness and the aperture of the optical system on the accuracy of the restorat ion are studied.