PHOTOELECTRON-SPECTRA ENHANCED BY X-RAY TOTAL-REFLECTION AND DIFFRACTION FROM PERIODIC MULTILAYER

Photoelectron spectra from a periodic multilayer of (Mo/B4C)(30)/Si we re measured by changing the x-ray glancing angle. The angular dependen cies of the photoelectron intensities of 0 1s and Mo 3d revealed the a tomic depth profiles of the Mo oxide overlayer, and the compositions o f the MoO3 upper layer and MoO2 lower layer. Furthermore, we observed enhancement of photoelectron emission by means of x-ray standing waves generated near the multilayer surface during x-ray diffraction from t he superlattice. (C) 1996 American Institute of Physics.