LOCAL ELECTROCHEMICAL OXIDATION REDUCTION - FIRST STEP TOWARDS A NEW LITHOGRAPHY/

Using c-axis La2CuO4 thin films, we first demonstrate that the electro chemical oxidation mainly occurs along the c axis. Then we induce oxyg en-rich regions electrochemically into an otherwise oxygen-deficient m atrix. On a microscopic scale the extra oxygen introduced creates meta llic and/or superconducting regions in the insulating matrix. Contrary to other lithographic techniques in which large amounts of material a re either removed or deposited, this technique does not induce signifi cant height differences. (C) 1996 American Institute of Physics.