POSSIBILITIES OF X-RAY INTERFERENCE DIFFRACTOMETRY FOR THE RECONSTRUCTION OF 2-DIMENSIONAL LATTICE DEFORMATION PROFILES IN CRYSTALS

Authors
ARISTOV VV GOUREEV TE NIKULIN AY PETRASHEN PV SNIGIREV AA
Citation
Vv. Aristov et al., POSSIBILITIES OF X-RAY INTERFERENCE DIFFRACTOMETRY FOR THE RECONSTRUCTION OF 2-DIMENSIONAL LATTICE DEFORMATION PROFILES IN CRYSTALS, Journal of physics. D, Applied physics, 26(4A), 1993, pp. 29-31
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Journal of physics. D, Applied physics → ACNP
ISSN journal
00223727
Volume
26
Issue
4A
Year of publication
1993
Pages
29 - 31
Database
ISI
SICI code
0022-3727(1993)26:4A<29:POXIDF>2.0.ZU;2-A
Abstract
We present a method of reconstruction of two-dimensional lattice defor mation fields in crystals with periodically distorted near-surface reg ions. The method is based on computer processing of triple-crystal x-r ay diffractometry data. It has high spatial resolution (approximately 10(-2) mum) and sensitivity to lattice parameter variation of the orde r of 10(-7). Deformation profiles in distorted Si crystals are reconst ructed.