TIO2 - FILMS OBTAINED FROM DIFFERENT TI-ALKOXIDES

The influence of both the different Ti-alkoxides (tetraethyl-, tetrais opropyl-, and tetrabutyl orthotitanate) and the nature of the substrat e on the preparation of TiO2 coatings has been investigated. The optic al constants (n, k), thickness (d), and structural properties have bee n determined using ellipsometry, UV-VIS spectroscopy and X-ray diffrac tion analysis. The fairly similar reactivity of Ti-ethoxide and Ti-iso propoxide leads for identical experimental conditions to films with id entical properties. Differences in the properties of the TiO2 films ha ve been noticed when Si wafers or silica-soda-lime glasses substrates have been used.