The Random Telegraph Signal (RTS) noise amplitude in Silicon-on-Insula
tor MOSFET's is studied as a function of the gate length, by adding a
second transistor in series, Different types of behavior can be distin
guished, pointing toward a different origin of the related trapping ce
nters, It is shown that in Linear operation, the RTS amplitude and the
corresponding low-frequency noise peak magnitude normally scales with
1/L, However, an increase with device length can also be found when t
he noise peaks of two RTS's add up, For RTS's occurring in the saturat
ion regime, a complete elimination is observed for larger L's, in supp
ort of the supposed film-related origin.