ATOMIC ARRANGEMENT AT THE ALN SIC INTERFACE

The lattice structure of the AlN/SiC interface has been studied in cro ss section by high-resolution transmission-electron microscopy. Lattic e images show planar and crystallographically abrupt interfaces. The a tomic arrangement at the plane of the interface is analyzed based on t he image characteristics. Possible bonding configurations are discusse d. Variations in local image contrast and interplanar separations are used to identify atomic bonding configurations consistent with the lat tice images.