X-RAY PHOTO-ELECTRON SPECTROMICROSCOPY

We report on the design implementation performances and experience of usage of the X-ray microscope system MAXIMUM. The project that began i n 1987 culminated in 1992, achieving the design goal of a spatial reso lution of sub 0.1 mu m at the same time as an energy resolution of bet ter than 250 meV. The system is based on the use of Schwarzschild opti cs coated with multilayers. We discuss the design implementation and a lignment techniques used in achieving the design goals. We also clarif y some issues related to the ultimate resolution of scanning Systems i n the presence of signal noise.