NOISE REMOVAL FROM AUGER IMAGES BY USING ADAPTIVE BINOMIAL FILTER

The application of the new smoothing routine based on adaptive binomia l filter for Scanning Auger Microscopy has been investigated. The main advantage of the adaptive binomial filter is the possibility to reduc e the noise without noticeable signal broadening. Experimental Auger i mages of the various samples (Au films on alumina and porous silicon f ilms) were processed by this routine. It was demonstrated that the emp loyment of the new smoothing routine improves the visual quality of ch emical images acid elemental scattering diagrams. The detailed surface chemical composition of the samples investigated was finally revealed by using elemental scattering diagram analysis.