Electron-ion bremsstrahlung spectra down to 4 keV emitted from plasmas
of the 7.25 GHz electron cyclotron resonance (ECR) ion source of the
Forschungszentrum Rossendorf and of the 14.5 GHz ECR ion source of the
Technische Universitat (TU) Dresden were de-convoluted using a newly
developed integration method. In the approximation of isotropy in velo
city space this method yields the exact electron energy distribution f
unction. The high energetic electrons are clearly separated into two B
oltzmann distributed populations. Their densities and temperatures cou
ld be estimated. Higher frequencies of the microwave can increase the
hot and warm electron densities by orders of magnitude. First results
are obtained for the behaviour of this populations belonging to the mi
xture (argon - oxygen). Gas mixing increases the densities of these po
pulations. The influence of the electron energy distribution function
on X-ray line intensities is discussed.