With a high-resolution two-crystal vacuum spectrometer equipped with b
eryl crystals, the Ge L alpha emission and Ga L alpha emission spectra
in fluorescence have been measured for Ge, GeO2, GaP, GaAs and Ga2O3.
The measured L alpha emission spectra consist of a prominent peak L a
lpha(1,2) and its high-energy structure, and are slightly influenced b
y chemical bonding. The L alpha emission spectrum of Ge is compared wi
th available multiplet calculations for Ge L alpha(1,2) satellites. Th
e high-energy structure is primarily attributed to the satellites as a
result of multiple ionizations.